Loading...

HIPURITY

Yongin-si,  Gyeonggi-do 
Korea (South)
http://www.hipurity.com
  • Booth: 157

  Products

  • Gaspuri
    Heated Getter Purifier...

  • Heated getter purifier Gaspuri purifies UHP Quality Gas removing impurities in process gas.
  • IGP Purifiers
    In line purifier...

  • In line purifier IGP purifies UHP Quality gas. It doesn't require electrical power as IGP purifier uses ambient adsorption.
  • OP-CRDS Analyzer
    OP-CRDS NH3 Analyzer for Moving FOUP enables Real-time measurement of NH3 pollution by direct sampling of cleanroom atmosphere ...

  • HiPurity's HP-NH3-F-OP facility is the first CRDS (Cavity Ring Down Spectroscopy) product to apply Open Path technology to semiconductor FAB. Trace AMC contamination such as NH3 is measured in real time by CRDS spectroscopy. Compared to the existing gas cell type CRDS facility, it directly measures the AMC concentration in the air without air sampling by vacuum pump, so it measures contamination accurately without interference.

Send Email

Type your information and click "Send Email" to send an email to this exhibitor. To return to the previous screen without saving, click "Reset".